New Optimization Strategy for Chemical Mechanical Polishing Process.

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Acknowledgments The duration of my Ph.D. study in the computer sciences department at the University of Texas at Austin is an interesting period of my life that I will always treasure. People in different circles have touched my life in this period. I wish to thank all of them sincerely from the bottom of my heart. Foremost, on the academic front, I wish to thank my committee members, especiall...

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ژورنال

عنوان ژورنال: JSME International Journal Series C

سال: 2001

ISSN: 1344-7653,1347-538X

DOI: 10.1299/jsmec.44.534